Anteryon offers a variety of customized precision glass products based on decades of experience with construction elements and optical parts.
Optical surfaces and accurate flatness on brittle materials are achieved by using abrasive as well as chemical processes.

CNC machining for fast and accurate machining

Anteryon has a broad spectrum of machining processes that can be offered to fit many customer-specific needs.

Simple and complex shapes can be realized by means of CNC milling, drilling, chamfering, contouring and grinding of glass with diamond tools. Machining of flat and curved surfaces, drilling of holes and contouring of glass and ceramic parts are all possible.

Geometry of the parts can vary from a few millimeters to 500 mm in size. Dimensional accuracies in the micron area can be achieved. With specially designed CNC finishing even sub-micron accuracy is within range.

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Producten:

  • Wafer chucks
  • Diffusors
  • Windows
  • Special lenses

Machining Equipment:

  • Matsuura MC 1000 VG: 4-axis CNC
  • Matsuura MC 510: 3 axis CNC
  • Hermle C 30 U: 5 axis CNVC
  • Kellenberger 600 U:
  • LOH SPM 120 L (2x): Lens grinding and polishing
  • Satisloh SPS 125 (2x): lens grinding and polishing

Lithography

Anteryon’s in-house Lithography includes mask design, process optimization and industrialization to ensure a cost effective mass production of your products.

Aside from the Lithography tools listed below our tool set includes high end wet and dry cleaning equipment, fast and slow baking under controlled environmental conditions, profilers and thickness measurement systems and various wet etching chemistries.

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Lithographic tools:

  • Large area (500*500) contact UV exposure unit
  • Suss MA8 and MA200 exposure units
  • UV film laminator
  • Resist spin coaters

Specifications:

  • Line widths
  • Layer thickness 100nm to several tens of µm
  • Area’s up to 500mm square
  • Grade 4 cleanliness

Powder blasting is a cost-effective and accurate alternative for etching

Using powder blasting a complex design of channels and/or holes can be structured into glass. A lithographic mask ensures the positioning and size of channels and/or holes as accurate as 10 µm. The complexity of the design is irrelevant to the process.

The shaped channels or holes can be either round or rectangular. The sidewalls are slightly slanted, due to the powder blasting process.

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The sides are sloped at a maximum angle of 70 degrees with an average roughness between 0.5 and 2.0 µm, with a Ra between 0.5 to 0.8 µm. A substrate with a size of up to 600x1000mm can be processed at one or both sides. This is done with an accuracy of better than 25 µm in x or y and less than 5 µm in z direction, and with a feature size of about 50 microns.

The surfaces of the powder blasted substrate remain undamaged, therefore polishing or AR coating can be done in advance. After powder blasting the substrate can be bonded to another glass or silicon substrate.

Polishing flat parts

Flatness of windows, mirrors, wafer chucks and other parts can be improved.

One of Anteryon’s special processes is the polishing of flat surfaces. These surfaces are found on windows, mirrors, wafer chucks and plan-glasses. We distinguish between two types of polishing: one for polishing to thickness and cosmetics, and one for polishing accurate flatness. The flatness that can be reached is around λ/10 at a diameter of 100 mm. Thickness tolerances typically are within a few micrometers. Sizes of substrates can vary from 10 mm tot 300 mm. Regular materials for flat polishing are optical glasses. Anteryon developed special polishing processes for substances such as Quartz, fused silica, Zerodur and YAG.

AR & Reflecting Coating

Anteryon develops and produces optical coatings in their on-site coating facility, such as:

Anti-reflection AR coatings, reflection (mirror) coatings, beam splitter coatings and filter coatings.

Anteryon offers high performance coatings on glass, plastics or even semiconductor substrates, yielding smooth and amorphous films with low scattering and absorption.

Anteryon’s Leybold SYRUSpro LC 1110 has an advanced plasma source (APS) evaporation system. Plasma Ion Assisted Deposition (PIAD) coating process is performed at low temperatures. Maximum batch size handled by the Leybold Syrus is 12 pieces of 200 mm diameter or 20 pieces of 100 x 120 mm.

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Anteryon also has a fully automatic Leybold Balzers Process Systems BPS Emerald sputtering system with automatically operated robot system and cassette load dock. Maximum batch size handled by the BPS Emerald is 8 pieces of 120 mm diameter.

Modern fully automatic ultrasonic cleaning equipment is available to clean the substrates before coating. High-end sensitive parts are cleaned by hand.

In-situ layer thickness process control is done with an optical monitoring system (Leybold OMS 3000 photometer) and a quartz crystal measuring system.

Product control is done with a Perkin Elmer Lambda 900 Spectrophotometer. Reflection and transmission measurements are performed on witness samples.

Anti-reflection AR coatings
An anti-reflection coating improves the transmission/efficiency of the optics, eliminates ghost images and enhances contrast.

Depending on the operational wavelength(s), Anteryon can apply a single-layer (e.g. MgF2)

or multi-layer V-coating or broadband coating (e.g. MgF2, TiO2, SiO2, HfO2, Ta2O5) in the ultra violet UV, visible VIS or near infra-red NIR range.

Reflective (mirror) coatings
Highly reflective metallic coatings are used as mirror coatings. Aluminium Al coatings are typically used for the visible VIS region. Gold Au or silver Ag for infra-red IR wavelength ranges.

Cr, Ni, Cu coatings are also available.

Beam splitter coatings
A beam splitter coating splits the intensity of the incoming light by reflecting R a certain percentage and transmitting T another.

Standards such as 50%R/50%T or 60%R/40%T are available.

Filter coatings
In order to transmit a specific wavelength range, Anteryon makes band-pass filters, dichroic filters, neutral density filters, long-pass filters and short-pass filters.

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